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Coating equipment coater - メーカー・企業と製品の一覧

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No setup change! Multi-wafer size compatible automatic resist coating device coater.

We can create a device that accommodates both the current wafer size and the wafer size you wish to use in the future (e.g., 2-4 inches, 6-8 inches, etc.).

Devices that can accommodate two or more wafer sizes can be produced without any setup changes. Examples of achievements: ■ 2/3/4 inch compatible devices ■ 4/5 inch compatible devices ■ 4/6 inch compatible devices ■ 6/8 inch compatible devices ■ 8/12 inch compatible devices Since it also varies depending on wafer weight and material, please feel free to consult us first. If you consider installing one dedicated device for each of the two wafer sizes, the installation area will effectively be halved! Of course, spin coating, HMDS treatment, baking, and cooling functions are standard features. We offer a lineup tailored to production volume, from manual machines to fully automatic machines, and since we handle everything from design to manufacturing and sales in-house, we have achieved low prices. 【Features】 ■ Compatibility with multiple inch size wafers (no setup changes) ■ Automatic operation with automatic wafer size recognition ■ Achieved low prices ■ Proven results with a variety of chemicals ■ Reduced footprint ■ Numerous options with resist reduction ■ Lineup tailored to production volume *For more details, please refer to the PDF materials or feel free to contact us.

  • Coater

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Thickness 100um! Ultra-thin wafer transport automatic resist coating device - Coater

We have extensive experience (know-how) in the transport and coating of fragile and thin wafers such as GaAs, LT, and glass!

What concerns us about thin wafers are breakage during transport and in-plane uniformity after coating. We have confidence in transporting thin and fragile wafers, as evidenced by our track record in manufacturing wafer transport devices (wafer sorters). We can accommodate a wide range of substrates including GaAs, LT (lithium tantalate), glass (quartz), GaN, sapphire, Si, and ceramics. Additionally, thin wafers tend to have variability in in-plane uniformity during coating, but this can be significantly improved by innovating the chuck and other components. Our product comes standard with spin coating, HMDS treatment, baking, and cooling functions. Depending on customer requirements and production volume, we can adjust the number of units and offer options from manual machines to fully automated systems. Since we handle everything from design to manufacturing and sales in-house, we have achieved low prices. 【Features】 ■ Robot compatible with thin wafers ■ Chuck compatible with thin wafers ■ Achieves low prices ■ Automatic recognition of wafer sizes ■ Proven performance with a variety of chemicals ■ Reduced footprint ■ Numerous options with minimal resist ■ Lineup tailored to production volume *For more details, please refer to the PDF document or feel free to contact us.

  • Coater

ブックマークに追加いたしました

ブックマーク一覧

ブックマークを削除いたしました

ブックマーク一覧

これ以上ブックマークできません

会員登録すると、ブックマークできる件数が増えて、ラベルをつけて整理することもできます

無料会員登録

Optimal for dual-sided processes! Dual-sided automatic photoresist coating device - Coater

By using the wafer inversion unit, both sides of the wafer can be automatically coated!

This device allows for automatic processing of both sides of a wafer with just a single setup. Coating is performed on one side at a time, but using a flipping unit, resist is applied to both sides by the time the automatic operation is complete. The processing is carried out using optimized transport procedures for coating, baking, and flipping to ensure that wafer processing is not rate-limiting. It can accommodate both positive and negative resists, ranging from low to high viscosity. This product is equipped with spin coating, HMDS treatment, baking, and cooling functions. Since we handle everything from design to manufacturing and sales in-house, we have achieved a low price. We have a proven track record with a variety of chemicals, including polyimide, SOG, WAX, and silicone. 【Features】 ■ Achieves low cost ■ Automatically recognizes wafer size for processing ■ Proven track record with a variety of chemicals ■ Reduced footprint ■ Numerous options with minimal resist ■ Lineup tailored to production volume *For more details, please refer to the PDF document or feel free to contact us.

  • Coater

ブックマークに追加いたしました

ブックマーク一覧

ブックマークを削除いたしました

ブックマーク一覧

これ以上ブックマークできません

会員登録すると、ブックマークできる件数が増えて、ラベルをつけて整理することもできます

無料会員登録